Yosias Melaku

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Berkeley, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods for reducing profile variation in photoresist trimming
- Patent number 6,653,058
- Issue date Nov 25, 2003
- Lam Research Corporation
- Vahid Vahedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving the profile angle between narrow and wide features
- Patent number 6,432,832
- Issue date Aug 13, 2002
- Lam Research Corporation
- Alan J. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing profile variation in photoresist trimming
- Patent number 6,316,169
- Issue date Nov 13, 2001
- Lam Research Corporation
- Vahid Vahedi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Methods for reducing profile variation in photoresist trimming
- Publication number 20020018965
- Publication date Feb 14, 2002
- Vahid Vahedi
- H01 - BASIC ELECTRIC ELEMENTS