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Yosuke Himori
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Tokyo, JP
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last 30 patents
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,154,797
Issue date
Nov 26, 2024
Ebara Corporation
Itsuki Kobata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROCESSING APPARATUS
Publication number
20240217050
Publication date
Jul 4, 2024
EBARA CORPORATION
Toshio MIZUNO
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, APPAR...
Publication number
20240165675
Publication date
May 23, 2024
EBARA CORPORATION
Yosuke HIMORI
B08 - CLEANING
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Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE...
Publication number
20240145276
Publication date
May 2, 2024
EBARA CORPORATION
Yosuke HIMORI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230038445
Publication date
Feb 9, 2023
EBARA CORPORATION
Itsuki KOBATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING CLEANING...
Publication number
20220013352
Publication date
Jan 13, 2022
Toshio Mizuno
H01 - BASIC ELECTRIC ELEMENTS