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Yosuke Itagaki
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for measuring thickness of thin film
Patent number
6,683,308
Issue date
Jan 27, 2004
Fab Solutions, Inc.
Yosuke Itagaki
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method and apparatus for measuring thickness of thin film
Publication number
20030132381
Publication date
Jul 17, 2003
NEC Electronics Corporation
Yosuke Itagaki
G01 - MEASURING TESTING