Yosuke Kawabuchi

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate drying apparatus, substrate drying method and storage medium
- Patent number 11,854,815
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning substrate processing apparatus and system of cle...
- Patent number 10,950,465
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Shotaro Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
- Patent number 10,867,814
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, substrate processing apparatus and record...
- Patent number 10,727,042
- Issue date Jul 28, 2020
- Tokyo Electron Limited
- Mitsunori Nakamori
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Substrate processing apparatus
- Patent number 10,692,739
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Yosuke Kawabuchi
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,504,718
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and re...
- Patent number 10,395,950
- Issue date Aug 27, 2019
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,192,758
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 9,805,957
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,362,106
- Issue date Jun 7, 2016
- Sony Corporation
- Hayato Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 9,321,085
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Teruomi Minami
- B08 - CLEANING
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 8,906,165
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 8,545,640
- Issue date Oct 1, 2013
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 8,475,668
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240429068
- Publication date Dec 26, 2024
- Tokyo Electron Limited
- Yosuke KAWABUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND STORAGE MEDIUM
- Publication number 20200357649
- Publication date Nov 12, 2020
- TOKYO ELECTRON LIMITED
- Yosuke KAWABUCHI
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20200126818
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Yosuke KAWABUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20190164785
- Publication date May 30, 2019
- TOKYO ELECTRON LIMITED
- Yosuke KAWABUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180254200
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180240684
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...
- Publication number 20180158699
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Shotaro Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180138058
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Keisuke Egashira
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180138035
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
- Publication number 20180130675
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORD...
- Publication number 20180040471
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180012781
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
- Publication number 20170236729
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20140360536
- Publication date Dec 11, 2014
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20140080312
- Publication date Mar 20, 2014
- Hayato IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20130133695
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20110315169
- Publication date Dec 29, 2011
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20110308549
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20110089137
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS

Yosuke Kawabuchi

Person

Patents Grantslast 30 patents

Substrate drying apparatus, substrate drying method and storage medium

Method of cleaning substrate processing apparatus and system of cle...

Liquid processing method, substrate processing apparatus, and stora...

Liquid processing method, substrate processing apparatus and record...

Substrate processing apparatus

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus, substrate processing method, and re...

Substrate processing apparatus

Substrate processing apparatus, substrate processing method and com...

Substrate processing method, substrate processing apparatus, and st...

Substrate processing method, storage medium storing computer progra...

Substrate processing method, storage medium storing computer progra...

Substrate processing method, storage medium storing computer progra...

Substrate liquid processing apparatus, substrate liquid processing...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

Substrate Processing Method and Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...

LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORD...

SUBSTRATE PROCESSING APPARATUS

LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...