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Photomask blank and photomask
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Patent number 8,012,654
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Issue date Sep 6, 2011
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Shin-Etsu Chemical Co., Ltd.
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Hiroki Yoshikawa
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Photomask blank and photomask
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Patent number 8,003,284
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Issue date Aug 23, 2011
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Shin-Etsu Chemical Co., Ltd.
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Hiroki Yoshikawa
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Photomask blank and photomask
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Patent number 7,767,366
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Issue date Aug 3, 2010
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Shin-Etsu Chemical Co., Ltd.
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Hiroki Yoshikawa
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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