Yosuke Sakai

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Kudamatsu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and operation method thereof
- Patent number 8,828,257
- Issue date Sep 9, 2014
- Hitachi High-Technologies Corporation
- Hiroho Kitada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus and operation method thereof
- Publication number 20100163403
- Publication date Jul 1, 2010
- Hiroho Kitada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Plasma Processing Method
- Publication number 20090321017
- Publication date Dec 31, 2009
- Tsunehiko Tsubone
- H01 - BASIC ELECTRIC ELEMENTS