Yosuke Shirata

Person

Saitama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus adjusting method, exposure apparatus, and device...
- Patent number 9,025,126
- Issue date May 5, 2015
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, cleaning method, and device fabricating method
- Patent number 8,654,306
- Issue date Feb 18, 2014
- Nikon Corporation
- Kenichi Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposing method, exposure apparatus, and device fabricating method
- Patent number 8,547,520
- Issue date Oct 1, 2013
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposing method, exposure apparatus, and device fabricating method
- Patent number 8,243,254
- Issue date Aug 14, 2012
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometric position-measuring devices and methods
- Patent number 7,876,452
- Issue date Jan 25, 2011
- Nikon Corporation
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Lithography system and method
- Patent number 6,882,403
- Issue date Apr 19, 2005
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method for performing alignment between shot areas on a w...
- Patent number 6,002,487
- Issue date Dec 14, 1999
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSING METHOD, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD
- Publication number 20120262683
- Publication date Oct 18, 2012
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, cleaning method, and device fabricating method
- Publication number 20090316120
- Publication date Dec 24, 2009
- Nikon Corporation
- Kenichi Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus adjusting method, exposure apparatus, and device...
- Publication number 20090279059
- Publication date Nov 12, 2009
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposing method, exposure apparatus, and device fabricating method
- Publication number 20080278695
- Publication date Nov 13, 2008
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yosuke Shirata

Person

Patents Grantslast 30 patents

Exposure apparatus adjusting method, exposure apparatus, and device...

Exposure apparatus, cleaning method, and device fabricating method

Exposing method, exposure apparatus, and device fabricating method

Exposing method, exposure apparatus, and device fabricating method

Interferometric position-measuring devices and methods

Lithography system and method

Alignment method for performing alignment between shot areas on a w...

Patents Applicationslast 30 patents

EXPOSING METHOD, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD

Exposure apparatus, cleaning method, and device fabricating method

Exposure apparatus adjusting method, exposure apparatus, and device...

Exposing method, exposure apparatus, and device fabricating method