TREA

Yosuke TAMURO

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,756,769
    • Issue date Sep 12, 2023
    • Tokyo Electron Limited
    • Takashi Tohara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,665,416
    • Issue date May 26, 2020
    • Tokyo Electron Limited
    • Shinji Kubota
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210313151
    • Publication date Oct 7, 2021
    • TOKYO ELECTRON LIMITED
    • Takashi TOHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200027688
    • Publication date Jan 23, 2020
    • TOKYO ELECTRON LIMITED
    • Shinji KUBOTA
    • H01 - BASIC ELECTRIC ELEMENTS