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Yosuke WATANABE
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Nirasaki City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Carbon film deposition method and deposition apparatus
Patent number
12,217,956
Issue date
Feb 4, 2025
Tokyo Electron Limited
Yosuke Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing boron nitride film and film deposition apparatus
Patent number
12,049,694
Issue date
Jul 30, 2024
Tokyo Electron Limited
Shota Chida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Carbon film forming method, carbon film forming apparatus, and stor...
Patent number
11,011,369
Issue date
May 18, 2021
Tokyo Electron Limited
Akira Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of growing gallium nitride-based crystal and heat treatment...
Patent number
9,966,258
Issue date
May 8, 2018
Tokyo Electron Limited
Kota Umezawa
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method and apparatus for forming silicon nitride film
Patent number
8,753,984
Issue date
Jun 17, 2014
Tokyo Electron Limited
Hiroki Murakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20240128081
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yoshihiro TAKEZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
Publication number
20240014031
Publication date
Jan 11, 2024
TOKYO ELECTRON LIMITED
Shota CHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD
Publication number
20230420249
Publication date
Dec 28, 2023
TOKYO ELECTRON LIMITED
Shota CHIDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20230245882
Publication date
Aug 3, 2023
TOKYO ELECTRON LIMITED
Yosuke WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARBON FILM DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20220246429
Publication date
Aug 4, 2022
TOKYO ELECTRON LIMITED
Yosuke WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DEPOSITING BORON NITRIDE FILM AND FILM DEPOSITION APPARATUS
Publication number
20220235457
Publication date
Jul 28, 2022
TOKYO ELECTRON LIMITED
Shota CHIDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARBON FILM FORMING METHOD, CARBON FILM FORMING APPARATUS, AND STOR...
Publication number
20170345644
Publication date
Nov 30, 2017
TOKYO ELECTRON LIMITED
Akira SHIMIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING CARBON FILM, APPARATUS OF FORMING CARBON FILM AND...
Publication number
20170342548
Publication date
Nov 30, 2017
TOKYO ELECTRON LIMITED
Akira SHIMIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARBON FILM FORMING METHOD, CARBON FILM FORMING APPARATUS, AND STOR...
Publication number
20170170065
Publication date
Jun 15, 2017
TOKYO ELECTRON LIMITED
Masayuki KITAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM
Publication number
20160265136
Publication date
Sep 15, 2016
TOKYO ELECTRON LIMITED
Kota UMEZAWA
C30 - CRYSTAL GROWTH
Information
Patent Application
Method of Growing Gallium Nitride-Based Crystal and Heat Treatment...
Publication number
20150221512
Publication date
Aug 6, 2015
TOKYO ELECTRON LIMITED
Kota UMEZAWA
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD OF CLEANING FILM FORMING APPARATUS AND FILM FORMING APPARATUS
Publication number
20140318457
Publication date
Oct 30, 2014
TOKYO ELECTRON LIMITED
Kota UMEZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS OF FORMING COMPOUND SEMICONDUCTOR FILM
Publication number
20140038394
Publication date
Feb 6, 2014
TOKYO ELECTRON LIMITED
Yosuke WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR FORMING SILICON NITRIDE FILM
Publication number
20120178264
Publication date
Jul 12, 2012
TOKYO ELECTRON LIMITED
Hiroki MURAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20110281443
Publication date
Nov 17, 2011
TOKYO ELECTRON LIMITED
Pao-Hwa CHOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...