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You Ishii
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Fujisawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
7,367,873
Issue date
May 6, 2008
Ebara Corporation
You Ishii
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and method
Patent number
7,108,589
Issue date
Sep 19, 2006
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus
Patent number
7,066,787
Issue date
Jun 27, 2006
Ebara Corporation
Masayuki Nakanishi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
RE38878
Issue date
Nov 15, 2005
Ebara Corporation
Masayoshi Hirose
451 - Abrading
Information
Patent Grant
Polishing apparatus and method
Patent number
6,935,932
Issue date
Aug 30, 2005
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for dressing polishing cloth
Patent number
6,905,400
Issue date
Jun 14, 2005
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing angular substrates
Patent number
6,790,129
Issue date
Sep 14, 2004
Shin-Etsu Chemical Co., Ltd.
Jiro Moriya
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and method
Patent number
6,722,964
Issue date
Apr 20, 2004
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
6,645,053
Issue date
Nov 11, 2003
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
RE38228
Issue date
Aug 19, 2003
Ebara Corporation
Masayoshi Hirose
451 - Abrading
Information
Patent Grant
Method and apparatus for dressing polishing cloth
Patent number
6,364,752
Issue date
Apr 2, 2002
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus having a cloth cartridge
Patent number
5,921,852
Issue date
Jul 13, 1999
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
5,716,264
Issue date
Feb 10, 1998
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
5,679,063
Issue date
Oct 21, 1997
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for polishing workpiece
Patent number
5,651,725
Issue date
Jul 29, 1997
Ebara Corporation
Ritsuo Kikuta
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for polishing workpiece
Patent number
5,651,724
Issue date
Jul 29, 1997
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
5,476,414
Issue date
Dec 19, 1995
Ebara Corporation
Masayoshi Hirose
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for polishing a workpiece
Patent number
5,398,459
Issue date
Mar 21, 1995
Kabushiki Kaisha Toshiba
Katsuya Okumura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
5,384,986
Issue date
Jan 31, 1995
Ebara Corporation
Masayoshi Hirose
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Substrate processing apparatus
Publication number
20080188167
Publication date
Aug 7, 2008
You Ishii
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and method
Publication number
20050260933
Publication date
Nov 24, 2005
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Application
Substrate processing apparatus
Publication number
20040185751
Publication date
Sep 23, 2004
Masayuki Nakanishi
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and method
Publication number
20040166783
Publication date
Aug 26, 2004
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Application
Substrate processing apparatus
Publication number
20040106363
Publication date
Jun 3, 2004
You Ishii
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus
Publication number
20040072512
Publication date
Apr 15, 2004
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Application
Method for polishing angular substrates
Publication number
20030036340
Publication date
Feb 20, 2003
Jiro Moriya
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for dressing polishing cloth
Publication number
20020072300
Publication date
Jun 13, 2002
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and method
Publication number
20010029150
Publication date
Oct 11, 2001
Norio Kimura
B24 - GRINDING POLISHING