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Cupertion, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing pads for high temperature processing
Patent number
11,911,870
Issue date
Feb 27, 2024
Applied Materials, Inc.
Sivapackia Ganapathiappan
B24 - GRINDING POLISHING
Information
Patent Grant
Low-temperature metal CMP for minimizing dishing and corrosion, and...
Patent number
11,897,079
Issue date
Feb 13, 2024
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Thin plastic polishing article for CMP applications
Patent number
10,786,885
Issue date
Sep 29, 2020
Applied Materials, Inc.
Robert D. Tolles
B24 - GRINDING POLISHING
Information
Patent Grant
Feedback control of polishing using optical detection of clearance
Patent number
9,073,169
Issue date
Jul 7, 2015
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical planarization of copper wafer polishing
Patent number
8,586,481
Issue date
Nov 19, 2013
Applied Materials, Inc.
You Wang
B24 - GRINDING POLISHING
Information
Patent Grant
Dishing and defect control of chemical mechanical polishing using r...
Patent number
8,210,900
Issue date
Jul 3, 2012
Applied Materials, Inc.
Wen-Chiang Tu
B24 - GRINDING POLISHING
Information
Patent Grant
Method and composition for electrochemically polishing a conductive...
Patent number
7,879,255
Issue date
Feb 1, 2011
Applied Materials, Inc.
Huyen Karen Tran
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Erosion-resistant components for plasma process chambers
Patent number
7,670,688
Issue date
Mar 2, 2010
Applied Materials, Inc.
Tony S. Kaushal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process and composition for conductive material removal by electroc...
Patent number
7,582,564
Issue date
Sep 1, 2009
Applied Materials, Inc.
Zhihong Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for electrochemically mechanically polishing a conductive ma...
Patent number
7,576,007
Issue date
Aug 18, 2009
Applied Materials, Inc.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrochemical method for Ecmp polishing pad conditioning
Patent number
7,504,018
Issue date
Mar 17, 2009
Applied Materials, Inc.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for electroprocessing a substrate with edge pr...
Patent number
7,422,982
Issue date
Sep 9, 2008
Applied Materials, Inc.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive pad with ion exchange membrane for electrochemical mecha...
Patent number
7,344,432
Issue date
Mar 18, 2008
Applied Materials, Inc.
Liang-Yun Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate support element for an electrochemical plating cell
Patent number
7,214,297
Issue date
May 8, 2007
Applied Materials, Inc.
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-layer ceramic electrostatic chuck with integrated channel
Patent number
6,639,783
Issue date
Oct 28, 2003
Applied Materials, Inc.
Shamouil Shamouilian
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Substrate support tolerant to thermal expansion stresses
Patent number
6,583,980
Issue date
Jun 24, 2003
Applied Materials Inc.
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having heater and method
Patent number
6,538,872
Issue date
Mar 25, 2003
Applied Materials, Inc.
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support having bonded sections and method
Patent number
6,503,368
Issue date
Jan 7, 2003
Applied Materials Inc.
Arnold Kholodenko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support pedestal
Patent number
6,490,145
Issue date
Dec 3, 2002
Applied Materials, Inc.
Arnold V. Kholodenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck bonded to base with a bond layer and method
Patent number
6,490,146
Issue date
Dec 3, 2002
Applied Materials Inc.
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having improved electrical connector and method
Patent number
6,462,928
Issue date
Oct 8, 2002
Applied Materials, Inc.
Shamouil Shamouilian
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck having gas cavity and method
Patent number
6,310,755
Issue date
Oct 30, 2001
Applied Materials, Inc.
Arnold Kholodenko
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Polymer chuck with heater and method of manufacture
Patent number
6,094,334
Issue date
Jul 25, 2000
Applied Materials, Inc.
Surinder S. Bedi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-electrode electrostatic chuck having fuses in hollow cavities
Patent number
6,055,150
Issue date
Apr 25, 2000
Applied Materials, Inc.
Jon Clinton
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LOW-TEMPERATURE METAL CMP FOR MINIMIZING DISHING AND CORROSION, AND...
Publication number
20240066660
Publication date
Feb 29, 2024
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PADS FOR HIGH TEMPERATURE PROCESSING
Publication number
20230080430
Publication date
Mar 16, 2023
Applied Materials, Inc.
Sivapackia GANAPATHIAPPAN
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY TEMPERATURE CONTROL BY MIXING AT DISPENSING
Publication number
20210046603
Publication date
Feb 18, 2021
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Application
LOW-TEMPERATURE METAL CMP FOR MINIMIZING DISHING AND CORROSION, AND...
Publication number
20210046602
Publication date
Feb 18, 2021
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Application
THIN PLASTIC POLISHING ARTICLE FOR CMP APPLICATIONS
Publication number
20180207770
Publication date
Jul 26, 2018
Applied Materials, Inc.
Robert D. TOLLES
B24 - GRINDING POLISHING
Information
Patent Application
INTERCONNECT FABRICATION AT AN INTEGRATED SEMICONDUCTOR PROCESSING...
Publication number
20140315381
Publication date
Oct 23, 2014
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL MECHANICAL POLISHING METHODS AND SYSTEMS INCLUDING PRE-TRE...
Publication number
20140308814
Publication date
Oct 16, 2014
Applied Materials, Inc.
David Maxwell Gage
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SLURRY FOR PLANARIZING PHOTORESIST
Publication number
20130189843
Publication date
Jul 25, 2013
You Wang
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SLURRY FOR COBALT APPLICATIONS
Publication number
20130186850
Publication date
Jul 25, 2013
APPLIED MATERIALS, INC.
You Wang
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Feedback Control of Polishing Using Optical Detection of Clearance
Publication number
20120064801
Publication date
Mar 15, 2012
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL PLANARIZATION OF COPPER WAFER POLISHING
Publication number
20110294293
Publication date
Dec 1, 2011
Applied Materials, Inc.
You Wang
B24 - GRINDING POLISHING
Information
Patent Application
DISHING AND DEFECT CONTROL OF CHEMICAL MECHANICAL POLISHING USING R...
Publication number
20100112903
Publication date
May 6, 2010
WEN-CHIANG TU
B24 - GRINDING POLISHING
Information
Patent Application
COMPOSITIONS AND METHODS FOR BARRIER LAYER POLISHING
Publication number
20100096360
Publication date
Apr 22, 2010
Applied Materials, Inc.
You Wang
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
MULTIPLE-STEP ELECTRODEPOSITION PROCESS FOR DIRECT COPPER PLATING O...
Publication number
20090120799
Publication date
May 14, 2009
Zhi-Wen Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
COMPOSITION FOR POLISHING A SUBSTRATE
Publication number
20080035882
Publication date
Feb 14, 2008
Junzi Zhao
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
APPARATUS FOR ELECTROPROCESSING A SUBSTRATE WITH EDGE PROFILE CONTROL
Publication number
20080035474
Publication date
Feb 14, 2008
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for conditioning a polishing pad
Publication number
20080020682
Publication date
Jan 24, 2008
Applied Materilas, Inc.
Renhe Jia
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for electroprocessing a substrate with edge pr...
Publication number
20080014709
Publication date
Jan 17, 2008
APPLIED MATERIALS, INC.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ABRASIVE COMPOSITION FOR ELECTROCHEMICAL MECHANICAL POLISHING
Publication number
20070254485
Publication date
Nov 1, 2007
Daxin Mao
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for electrochemical mechanical polishing of cu...
Publication number
20070251832
Publication date
Nov 1, 2007
APPLIED MATERIALS, INC.
Tianbao Du
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Process for high copper removal rate with good planarization and su...
Publication number
20070235344
Publication date
Oct 11, 2007
APPLIED MATERIALS, INC.
Renhe Jia
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for foam removal in an electrochemical mechani...
Publication number
20070181442
Publication date
Aug 9, 2007
APPLIED MATERIALS, INC.
Renhe Jia
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Methods for electrochemical processing with pre-biased cells
Publication number
20070158207
Publication date
Jul 12, 2007
APPLIED MATERIALS, INC.
Jie Diao
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for electrochemically mechanically polishing a conductive ma...
Publication number
20070161250
Publication date
Jul 12, 2007
APPLIED MATERIALS, INC.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate polishing with surface pretreatment
Publication number
20070151866
Publication date
Jul 5, 2007
APPLIED MATERIALS, INC.
Zhihong Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Fully conductive pad for electrochemical mechanical processing
Publication number
20070153453
Publication date
Jul 5, 2007
APPLIED MATERIALS, INC.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND COMPOSITION FOR ELECTROCHEMICALLY POLISHING A CONDUCTIVE...
Publication number
20070102303
Publication date
May 10, 2007
APPLIED MATERIALS, INC.
HUYEN KAREN TRAN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROCHEMICAL METHOD FOR ECMP POLISHING PAD CONDITIONING
Publication number
20070095677
Publication date
May 3, 2007
APPLIED MATERIALS, INC.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONDUCTIVE PAD WITH ION EXCHANGE MEMBRANE FOR ELECTROCHEMICAL MECHA...
Publication number
20070099552
Publication date
May 3, 2007
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
Bonded multi-layer RF window
Publication number
20070079936
Publication date
Apr 12, 2007
Applied Materials, Inc.
Maocheng Li
B32 - LAYERED PRODUCTS