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Patents Grantslast 30 patents

Information Patent Grant
Etching method
- Patent number 6,753,263
- Issue date Jun 22, 2004
- Tokyo Electron Limited
- Youbun Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 6,602,435
- Issue date Aug 5, 2003
- Tokyo Electron Limited
- Masahiro Yamada
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Etchant for use in a semiconductor processing method and system
- Patent number 6,465,359
- Issue date Oct 15, 2002
- Tokyo Electron Ltd.
- Masahiro Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing method and system using C.sub.5 F.sub.8
- Patent number 6,159,862
- Issue date Dec 12, 2000
- Tokyo Electron Ltd.
- Masahiro Yamada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHANT FOR USE IN A SEMICONDUCTOR PROCESSING METHOD AND SYSTEM
- Publication number 20020030174
- Publication date Mar 14, 2002
- MASAHIRO YAMADA
- H01 - BASIC ELECTRIC ELEMENTS