Youfan Gu

Person

Superior, CO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Powder and deposition control in throttle valves
- Patent number 9,314,824
- Issue date Apr 19, 2016
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion and deposition protected valve apparatus and method
- Patent number 9,206,919
- Issue date Dec 8, 2015
- MKS Instruments, Inc.
- David Neumeister
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of two-stage flow control
- Patent number 9,200,711
- Issue date Dec 1, 2015
- MKS Instruments, Inc.
- Youfan Gu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for preventing ALD reactants from damaging vac...
- Patent number 8,679,287
- Issue date Mar 25, 2014
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two-stage, slow-start valve apparatus
- Patent number 8,671,987
- Issue date Mar 18, 2014
- MKS Instruments, Inc.
- Youfan Gu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Heater control with high-limit thermal safety shutdown
- Patent number 8,541,716
- Issue date Sep 24, 2013
- MKS Instruments, Inc.
- Youfan Gu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Fast-acting pneumatic diaphragm valve
- Patent number 8,172,197
- Issue date May 8, 2012
- MKS Instruments, Inc.
- Youfan Gu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Integrated absolute and differential pressure transducer
- Patent number 7,962,294
- Issue date Jun 14, 2011
- MKS Instruments, Inc.
- Paul Dozoretz
- G01 - MEASURING TESTING
Information Patent Grant
Multiple heater control system with expandable modular functionality
- Patent number 7,932,480
- Issue date Apr 26, 2011
- MKS Instruments, Inc.
- Youfan Gu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Reactive chemical containment system
- Patent number 7,871,587
- Issue date Jan 18, 2011
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated absolute and differential pressure transducer
- Patent number 7,477,996
- Issue date Jan 13, 2009
- MKS Instruments, Inc.
- Paul Dozoretz
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for preventing products of TiCL4 and NH3 or ot...
- Patent number 7,455,720
- Issue date Nov 25, 2008
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using a combination differential and absolute pressure tr...
- Patent number 7,076,920
- Issue date Jul 18, 2006
- MKS Instruments, Inc.
- Garry Holcomb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated absolute and differential pressure transducer
- Patent number 6,909,975
- Issue date Jun 21, 2005
- MKS Instruments, Inc.
- Paul Dozoretz
- G01 - MEASURING TESTING
Information Patent Grant
Vapor delivery system
- Patent number 6,895,178
- Issue date May 17, 2005
- MKS Instruments, Inc.
- Youfan Gu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for removing condensable aluminum chloride vapor from alumin...
- Patent number 6,790,258
- Issue date Sep 14, 2004
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination differential and absolute pressure transducer for load...
- Patent number 6,672,171
- Issue date Jan 6, 2004
- MKS Instruments, Inc.
- Youfan Gu
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration assisted particle/gas separation system
- Patent number 6,562,109
- Issue date May 13, 2003
- MKS Instruments, Inc.
- Darren Livingston
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Trap apparatus and method for condensable by-products of deposition...
- Patent number 6,488,745
- Issue date Dec 3, 2002
- MKS Instruments, Inc.
- Youfan Gu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for controlling polymerized teos build-up in vacuum pump...
- Patent number 6,361,607
- Issue date Mar 26, 2002
- MKS Instruments, Inc.
- Paul Dozoretz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for removing condensable aluminum vapor from a...
- Patent number 6,238,514
- Issue date May 29, 2001
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling polymerized teos build-up in v...
- Patent number 6,197,119
- Issue date Mar 6, 2001
- MKS Instruments, Inc.
- Paul Dozoretz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing build-up of material on inner sur...
- Patent number 5,827,370
- Issue date Oct 27, 1998
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid cooled trap
- Patent number 5,820,641
- Issue date Oct 13, 1998
- MKS Instruments, Inc.
- Youfan Gu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
POWDER AND DEPOSITION CONTROL IN THROTTLE VALVES
- Publication number 20150129047
- Publication date May 14, 2015
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF TWO-STAGE FLOW CONTROL
- Publication number 20140130876
- Publication date May 15, 2014
- MKS Instruments, Inc.
- Youfan Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORROSION AND DEPOSITION PROTECTED VALVE APPARATUS AND METHOD
- Publication number 20140109973
- Publication date Apr 24, 2014
- MKS Instruments, Inc.
- David Neumeister
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR
- Publication number 20130146225
- Publication date Jun 13, 2013
- MKS Instruments, Inc.
- Xing Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO-STAGE, SLOW-START VALVE APPARATUS AND METHOD
- Publication number 20120153193
- Publication date Jun 21, 2012
- MKS Instruments, Inc.
- Youfan Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE HEATER CONTROL SYSTEM WITH EXPANDABLE MODULAR FUNCTIONALITY
- Publication number 20120061369
- Publication date Mar 15, 2012
- WATLOW ELECTRONIC MANUFACTURING COMPANY
- Youfan Gu
- G05 - CONTROLLING REGULATING
Information Patent Application
REACTIVE CHEMICAL CONTAINMENT SYSTEM
- Publication number 20100166630
- Publication date Jul 1, 2010
- MKS Instruments, Inc.
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER
- Publication number 20090228219
- Publication date Sep 10, 2009
- MKS Instruments, Inc.
- Paul Dozoretz
- G01 - MEASURING TESTING
Information Patent Application
FAST-ACTING PNEUMATIC DIAPHRAGM VALVE
- Publication number 20080023661
- Publication date Jan 31, 2008
- Youfan Gu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER
- Publication number 20070288179
- Publication date Dec 13, 2007
- MKS Instruments, Inc.
- Paul Dozoretz
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE HEATER CONTROL SYSTEM WITH EXPANDABLE MODULAR FUNCTIONALITY
- Publication number 20070235440
- Publication date Oct 11, 2007
- Youfan Gu
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for preventing ALD reactants from damaging vac...
- Publication number 20060264045
- Publication date Nov 23, 2006
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for preventing products of TiCL4 and NH3 or ot...
- Publication number 20060180026
- Publication date Aug 17, 2006
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated absolute and differential pressure transducer
- Publication number 20060004539
- Publication date Jan 5, 2006
- Paul Dozoretz
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER
- Publication number 20050114070
- Publication date May 26, 2005
- Paul Dozoretz
- G01 - MEASURING TESTING
Information Patent Application
Vapor delivery system
- Publication number 20030063901
- Publication date Apr 3, 2003
- Youfan Gu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COMBINATION DIFFERENTIAL AND ABSOLUTE PRESSURE TRANSDUCER FOR LOAD...
- Publication number 20030010129
- Publication date Jan 16, 2003
- Youfan Gu
- G01 - MEASURING TESTING
Information Patent Application
Acceleration assisted particle/gas separation system
- Publication number 20020139249
- Publication date Oct 3, 2002
- Darren Livingston
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TRAP APPARATUS AND METHOD FOR CONDENSABLE BY-PRODUCTS OF DEPOSITION...
- Publication number 20020134244
- Publication date Sep 26, 2002
- MKS Instruments, Inc.
- Youfan Gu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method for removing condensable aluminum chloride vapor from alumin...
- Publication number 20020053191
- Publication date May 9, 2002
- Youfan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Combination differential and absolute pressure transducer for load...
- Publication number 20010029889
- Publication date Oct 18, 2001
- Garry Holcomb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for controlling polymerized teos build-up in vacuum pump...
- Publication number 20010017080
- Publication date Aug 30, 2001
- Paul Dozoretz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Powder and deposition control in throttle valves

Corrosion and deposition protected valve apparatus and method

Method of two-stage flow control

Method and apparatus for preventing ALD reactants from damaging vac...

Two-stage, slow-start valve apparatus

Heater control with high-limit thermal safety shutdown

Fast-acting pneumatic diaphragm valve

Integrated absolute and differential pressure transducer

Multiple heater control system with expandable modular functionality

Reactive chemical containment system

Integrated absolute and differential pressure transducer

Method and apparatus for preventing products of TiCL4 and NH3 or ot...

Method of using a combination differential and absolute pressure tr...

Integrated absolute and differential pressure transducer

Vapor delivery system

Method for removing condensable aluminum chloride vapor from alumin...

Combination differential and absolute pressure transducer for load...

Acceleration assisted particle/gas separation system

Trap apparatus and method for condensable by-products of deposition...

Apparatus for controlling polymerized teos build-up in vacuum pump...

Apparatus and method for removing condensable aluminum vapor from a...

Method and apparatus for controlling polymerized teos build-up in v...

Method and apparatus for reducing build-up of material on inner sur...

Fluid cooled trap

Patents Applicationslast 30 patents

POWDER AND DEPOSITION CONTROL IN THROTTLE VALVES

METHOD OF TWO-STAGE FLOW CONTROL

CORROSION AND DEPOSITION PROTECTED VALVE APPARATUS AND METHOD

GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR

TWO-STAGE, SLOW-START VALVE APPARATUS AND METHOD

MULTIPLE HEATER CONTROL SYSTEM WITH EXPANDABLE MODULAR FUNCTIONALITY

REACTIVE CHEMICAL CONTAINMENT SYSTEM

INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER

FAST-ACTING PNEUMATIC DIAPHRAGM VALVE

INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER

MULTIPLE HEATER CONTROL SYSTEM WITH EXPANDABLE MODULAR FUNCTIONALITY

Method and apparatus for preventing ALD reactants from damaging vac...

Method and apparatus for preventing products of TiCL4 and NH3 or ot...

Integrated absolute and differential pressure transducer

INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER

Vapor delivery system

COMBINATION DIFFERENTIAL AND ABSOLUTE PRESSURE TRANSDUCER FOR LOAD...

Acceleration assisted particle/gas separation system

TRAP APPARATUS AND METHOD FOR CONDENSABLE BY-PRODUCTS OF DEPOSITION...

Method for removing condensable aluminum chloride vapor from alumin...

Combination differential and absolute pressure transducer for load...

Apparatus for controlling polymerized teos build-up in vacuum pump...