TREA

Youichi Deguchi

Follow

Person

  • Machida, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 5,665,166
    • Issue date Sep 9, 1997
    • Tokyo Electron Limited
    • Youichi Deguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 5,591,269
    • Issue date Jan 7, 1997
    • Tokyo Electron Limited
    • Junichi Arami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma process apparatus
    • Patent number 5,478,429
    • Issue date Dec 26, 1995
    • Tokyo Electron Limited
    • Mitsuaki Komino
    • H01 - BASIC ELECTRIC ELEMENTS