Youichi Nakayama

Follow

Person

Nirasaki Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,766,617
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Junichi Ogawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of lowering temperature of substrate table, computer-readabl...
- Patent number 9,070,728
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Kenichi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target object processing system and method of controlling the same
- Patent number 8,612,038
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Kenichi Kobayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Capacitive coupling plasma processing apparatus and method
- Patent number 7,692,916
- Issue date Apr 6, 2010
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, history information recording metho...
- Patent number 7,266,418
- Issue date Sep 4, 2007
- Tokyo Electron Limited
- Youichi Nakayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140121814
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Junichi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF LOWERING TEMPERATURE OF SUBSTRATE TABLE, COMPUTER-READABL...
- Publication number 20110114298
- Publication date May 19, 2011
- TOKYO ELECTRON LIMITED
- Kenichi KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGET OBJECT PROCESSING SYSTEM AND METHOD OF CONTROLLING THE SAME
- Publication number 20100292809
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Kenichi Kobayashi
- G05 - CONTROLLING REGULATING
Information Patent Application
Capacitive coupling plasma processing apparatus and method
- Publication number 20070029194
- Publication date Feb 8, 2007
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, history information recording metho...
- Publication number 20060224265
- Publication date Oct 5, 2006
- TOKYO ELECTRON LIMITED
- Youichi Nakayama
- H01 - BASIC ELECTRIC ELEMENTS