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Youichirou CHIBA
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Nirasaki City, JP
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Patents Grants
last 30 patents
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Patent Grant
Recess filling method and processing apparatus
Patent number
9,865,467
Issue date
Jan 9, 2018
Tokyo Electron Limited
Daisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Depression filling method and processing apparatus
Patent number
9,653,555
Issue date
May 16, 2017
Tokyo Electron Limited
Youichirou Chiba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Depression filling method and processing apparatus
Patent number
9,646,879
Issue date
May 9, 2017
Tokyo Electron Limited
Akinobu Kakimoto
C30 - CRYSTAL GROWTH
Information
Patent Grant
Depression filling method and processing apparatus
Patent number
9,574,284
Issue date
Feb 21, 2017
Tokyo Electron Limited
Youichirou Chiba
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
Depression Filling Method and Processing Apparatus
Publication number
20160240618
Publication date
Aug 18, 2016
TOKYO ELECTRON LIMITED
Youichirou CHIBA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPRESSION FILLING METHOD AND PROCESSING APPARATUS
Publication number
20160240379
Publication date
Aug 18, 2016
TOKYO ELECTRON LIMITED
Youichirou CHIBA
C30 - CRYSTAL GROWTH
Information
Patent Application
RECESS FILLING METHOD AND PROCESSING APPARATUS
Publication number
20160126103
Publication date
May 5, 2016
TOKYO ELECTRON LIMITED
Daisuke SUZUKI
C30 - CRYSTAL GROWTH
Information
Patent Application
Depression Filling Method and Processing Apparatus
Publication number
20150187643
Publication date
Jul 2, 2015
TOKYO ELECTRON LIMITED
Akinobu KAKIMOTO
C30 - CRYSTAL GROWTH