Youji Taguchi

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Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled RF plasma source
- Patent number 6,469,448
- Issue date Oct 22, 2002
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Youji Taguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Inductively coupled RF plasma source
- Publication number 20020096999
- Publication date Jul 25, 2002
- Youji Taguchi
- H01 - BASIC ELECTRIC ELEMENTS