Youn-Jin Oh

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San Ramon, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Prevention of line bending and tilting for etch with tri-layer mask
- Patent number 8,946,091
- Issue date Feb 3, 2015
- Lam Research Corporation
- Youn-Jin Oh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH ASPECT RATIO DIELECTRIC ETCH WITH CHLORINE
- Publication number 20230127597
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Rui Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF LINE BENDING AND TILTING FOR ETCH WITH TRI-LAYER MASK
- Publication number 20120276747
- Publication date Nov 1, 2012
- LAM RESEARCH CORPORATION
- Youn-Jin Oh
- H01 - BASIC ELECTRIC ELEMENTS