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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for etching thin layer
Patent number
11,495,467
Issue date
Nov 8, 2022
Semes Co., Ltd.
Jung Suk Goh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD USING THE PLASMA
Publication number
20230317415
Publication date
Oct 5, 2023
SEMES CO., LTD.
Dong Hun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING PLASMA
Publication number
20230317419
Publication date
Oct 5, 2023
SEMES CO., LTD.
Young Je UM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20230207248
Publication date
Jun 29, 2023
SEMES CO., LTD.
Young Je UM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20230207275
Publication date
Jun 29, 2023
SEMES CO., LTD.
Yoon Jong JU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING PLASMA
Publication number
20230197412
Publication date
Jun 22, 2023
SEMES CO, LTD.
Seong Gil LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPM...
Publication number
20230144896
Publication date
May 11, 2023
SEMES CO., LTD.
Young Je UM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
Publication number
20230148026
Publication date
May 11, 2023
SEMES CO., LTD.
Seong Gil LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
Publication number
20230026796
Publication date
Jan 26, 2023
SEMES CO., LTD.
Young Je UM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20230022720
Publication date
Jan 26, 2023
SEMES CO., LTD.
Young Je UM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM COMPRISI...
Publication number
20220090861
Publication date
Mar 24, 2022
SEMES CO., LTD.
Young Je Um
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND APPARATUS FOR PROCE...
Publication number
20220084829
Publication date
Mar 17, 2022
SEMES CO., LTD.
Joun Taek Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING PLASMA
Publication number
20220076925
Publication date
Mar 10, 2022
SEMES CO., LTD.
Joun Yaek Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING THIN LAYER
Publication number
20210183660
Publication date
Jun 17, 2021
SEMES CO., LTD.
Jung Suk GOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS
Publication number
20210134617
Publication date
May 6, 2021
SEMES CO., LTD.
Yong Jun SEO
H01 - BASIC ELECTRIC ELEMENTS