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Ansan, KR
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Patents Grants
last 30 patents
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Patent Grant
Loading device of chemical mechanical polishing equipment for semic...
Patent number
7,892,069
Issue date
Feb 22, 2011
K.C. Tech Co., Ltd.
Young Min Na
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Loading Device of Chemical Mechanical Polishing Equipment for Semic...
Publication number
20090130955
Publication date
May 21, 2009
DOOSAN MECATEC CO., LTD.
Young Min Na
B24 - GRINDING POLISHING