Young-Tong Tsai

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Single wafer in-situ dry clean and seasoning for plasma etching pro...
- Patent number 6,274,500
- Issue date Aug 14, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Dai Xuechun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aqueous surfactant solution method for stripping metal plasma etch...
- Patent number 6,057,240
- Issue date May 2, 2000
- Chartered Semiconductor Manufacturing, Ltd.
- Mei-Sheng Zhou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for forming residue free patterned polysilicon layers upon h...
- Patent number 5,792,708
- Issue date Aug 11, 1998
- Chartered Semiconductor Manufacturing Pte Ltd
- Mei Sheng Zhou
- H01 - BASIC ELECTRIC ELEMENTS