Young-Tong Tsai

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Self-aligned contact process implementing bias compensation etch en...
- Patent number 6,861,362
- Issue date Mar 1, 2005
- Lam Research Corporation
- Jun-Cheng Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
All dual damascene oxide etch process steps in one confined plasma...
- Patent number 6,559,049
- Issue date May 6, 2003
- Lam Research Corporation
- Lawrence Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Self-aligned contact process implementing bias compensation etch en...
- Publication number 20050130334
- Publication date Jun 16, 2005
- LAM RESEARCH CORPORATION
- Jun-Cheng Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
All dual damascene oxide etch process steps in one confined plasma...
- Publication number 20030032278
- Publication date Feb 13, 2003
- LAM RESEARCH CORPORATION
- Lawrence Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-aligned contact process implementing bias compensation etch en...
- Publication number 20030000923
- Publication date Jan 2, 2003
- Jun-Cheng Ko
- H01 - BASIC ELECTRIC ELEMENTS