Youngdon Chang

Follow

Person

Gyeonggi-do, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Sidewall spacer patterning method using gas cluster ion beam
- Patent number 9,500,946
- Issue date Nov 22, 2016
- TEL Epion Inc.
- Soo Doo Chae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SIDEWALL SPACER PATTERNING METHOD USING GAS CLUSTER ION BEAM
- Publication number 20160222521
- Publication date Aug 4, 2016
- TEL Epion Inc.
- Soo Doo Chae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...