Youngduk SUH

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Seoul, KR

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning collector of EUV light source system
- Patent number 11,940,620
- Issue date Mar 26, 2024
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- B08 - CLEANING
Information Patent Grant
Extreme ultraviolet (EUV) collector inspection apparatus and method
- Patent number 11,676,263
- Issue date Jun 13, 2023
- Samsung Electronics Co., Ltd.
- Dong-Hyub Lee
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR CLEANING AN EXTREME ULTRAVIOLET LIGHT CREATION CHAMBER
- Publication number 20240280917
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jung Dohyun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR FABRICATION APPARATUS
- Publication number 20230251576
- Publication date Aug 10, 2023
- Samsung Electronics Co., Ltd.
- OHKUG KWON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
- Publication number 20220308339
- Publication date Sep 29, 2022
- Samsung Electronics Co., Ltd.
- Changsoon LIM
- B08 - CLEANING
Information Patent Application
EXTREME ULTRAVIOLET (EUV) COLLECTOR INSPECTION APPARATUS AND METHOD
- Publication number 20220309643
- Publication date Sep 29, 2022
- Samsung Electronics Co., Ltd.
- Dong-Hyub Lee
- G06 - COMPUTING CALCULATING COUNTING