Youngduk SUH

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning collector of EUV light source system
- Patent number 11,940,620
- Issue date Mar 26, 2024
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- B08 - CLEANING
Information Patent Grant
Extreme ultraviolet (EUV) collector inspection apparatus and method
- Patent number 11,676,263
- Issue date Jun 13, 2023
- Samsung Electronics Co., Ltd.
- Dong-Hyub Lee
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET SOURCE CLEANING APPARATUS, EUV SOURCE CLEANING...
- Publication number 20250076775
- Publication date Mar 6, 2025
- SAMSUNG ELECTRONICS CO,. LTD.
- CHULMIN CHO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
- Publication number 20250081320
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- Injae LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR CLEANING AN EXTREME ULTRAVIOLET LIGHT CREATION CHAMBER
- Publication number 20240280917
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jung Dohyun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR FABRICATION APPARATUS
- Publication number 20230251576
- Publication date Aug 10, 2023
- Samsung Electronics Co., Ltd.
- OHKUG KWON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
- Publication number 20220308339
- Publication date Sep 29, 2022
- Samsung Electronics Co., Ltd.
- Changsoon LIM
- B08 - CLEANING
Information Patent Application
EXTREME ULTRAVIOLET (EUV) COLLECTOR INSPECTION APPARATUS AND METHOD
- Publication number 20220309643
- Publication date Sep 29, 2022
- Samsung Electronics Co., Ltd.
- Dong-Hyub Lee
- G06 - COMPUTING CALCULATING COUNTING

Youngduk SUH

Person

Patents Grantslast 30 patents

Method of cleaning collector of EUV light source system

Extreme ultraviolet (EUV) collector inspection apparatus and method

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET SOURCE CLEANING APPARATUS, EUV SOURCE CLEANING...

EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

APPARATUS FOR CLEANING AN EXTREME ULTRAVIOLET LIGHT CREATION CHAMBER

SEMICONDUCTOR FABRICATION APPARATUS

METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM

EXTREME ULTRAVIOLET (EUV) COLLECTOR INSPECTION APPARATUS AND METHOD