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Younggi HONG
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Gyeonggi-do, KR
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor film forming method and film forming apparatus
Patent number
10,957,535
Issue date
Mar 23, 2021
Tokyo Electron Limited
Yutaka Motoyama
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND OXIDATION METHOD
Publication number
20220068637
Publication date
Mar 3, 2022
Tokyo Electron Limited
Kotaro MIYATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Semiconductor Film Forming Method and Film Forming Apparatus
Publication number
20190348278
Publication date
Nov 14, 2019
TOKYO ELECTRON LIMITED
Yutaka MOTOYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...