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Younghoo Kim
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Yongin-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method, micropattern forming method, and subst...
Patent number
12,057,323
Issue date
Aug 6, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for processing a substrate
Patent number
11,935,772
Issue date
Mar 19, 2024
Samsung Electronics Co., Ltd.
Seohyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus including light source supplying light to wafer and windo...
Patent number
11,798,801
Issue date
Oct 24, 2023
Samsung Electronics Co., Ltd.
Hunjae Jang
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus, semiconductor manufacturing equipme...
Patent number
11,640,115
Issue date
May 2, 2023
Samsung Electronics Co., Ltd.
Jihoon Jeong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus including light source supplying light to wafer and windo...
Patent number
11,482,410
Issue date
Oct 25, 2022
Samsung Electronics Co., Ltd.
Hunjae Jang
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240339334
Publication date
Oct 10, 2024
Samsung Electronics Co., Ltd.
Sangjine PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD USING TH...
Publication number
20240087856
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Jiwon Son
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPME...
Publication number
20230244150
Publication date
Aug 3, 2023
Samsung Electronics Co., Ltd.
Jihoon Jeong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS INCLUDING LIGHT SOURCE SUPPLYING LIGHT TO WAFER AND WINDO...
Publication number
20230078220
Publication date
Mar 16, 2023
SAMSUNG ELECTRONICS., LTD.
Hunjae JANG
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR DRYING SUBSTRATE
Publication number
20230010670
Publication date
Jan 12, 2023
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR DRYING WAFER AND METHOD FOR DRYING WAFER
Publication number
20230004089
Publication date
Jan 5, 2023
Samsung Electronics Co., Ltd.
Sangjine PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
WAFER PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING SEMICONDUCTO...
Publication number
20220325953
Publication date
Oct 13, 2022
Samsung Electronics Co., Ltd.
Sangjine PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING METHOD USING LOW TEMPERATURE DEVELOPER AND SEM...
Publication number
20220326617
Publication date
Oct 13, 2022
Samsung Electronics Co., Ltd.
Sangjine Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING SHOWER HEAD AND EDGE RING...
Publication number
20220301827
Publication date
Sep 22, 2022
Samsung Electronics Co., Ltd.
Woorim LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER-CLEANING APPARATUS INCLUDING A WINDOW PROTECTOR AND A METHOD...
Publication number
20220230872
Publication date
Jul 21, 2022
Samsung Electronics Co., Ltd.
Hunjae JANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, MICROPATTERN FORMING METHOD, AND SUBST...
Publication number
20220208558
Publication date
Jun 30, 2022
Samsung Electronics Co., Ltd.
Sangjine PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20220199440
Publication date
Jun 23, 2022
Samsung Electronics Co., Ltd.
Seohyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEATING APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE
Publication number
20220159788
Publication date
May 19, 2022
Samsung Electronics Co., Ltd.
Taehong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPME...
Publication number
20220075268
Publication date
Mar 10, 2022
Samsung Electronics Co., Ltd.
Jihoon Jeong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY