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YounGi Hong
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Pleasanton, CA, US
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last 30 patents
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Patent Grant
Systems and methods for forming ultra-shallow junctions
Patent number
9,543,150
Issue date
Jan 10, 2017
Lam Research Corporation
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SYSTEMS AND METHODS FOR FORMING ULTRA-SHALLOW JUNCTIONS
Publication number
20160365251
Publication date
Dec 15, 2016
LAM RESEARCH CORPORATION
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS