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Youngjin Choi
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San Ramon, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Metal hardmask all in one integrated etch
Patent number
9,349,606
Issue date
May 24, 2016
Lam Research Corporation
Yu Cheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METAL HARDMASK ALL IN ONE INTEGRATED ETCH
Publication number
20150179472
Publication date
Jun 25, 2015
LAM RESEARCH CORPORATION
Yu Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Line edge roughness control
Publication number
20040171260
Publication date
Sep 2, 2004
Lam Research Corporation
Youngjin Choi
H01 - BASIC ELECTRIC ELEMENTS