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Patents Grants
last 30 patents
Information
Patent Grant
Control device, system and control method
Patent number
12,165,892
Issue date
Dec 10, 2024
Tokyo Electron Limited
Yuichi Takenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, information processing apparatus, a...
Patent number
11,804,395
Issue date
Oct 31, 2023
Tokyo Electron Limited
Youngtai Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, information processing apparatus, a...
Patent number
11,574,828
Issue date
Feb 7, 2023
Tokyo Electron Limited
Youngtai Kang
G05 - CONTROLLING REGULATING
Information
Patent Grant
License authentication device and license authentication method
Patent number
11,568,027
Issue date
Jan 31, 2023
Tokyo Electron Limited
Takahito Kasai
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Substrate processing apparatus, information processing apparatus, a...
Patent number
11,302,555
Issue date
Apr 12, 2022
Tokyo Electron Limited
Youngtai Kang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20240087926
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Youngtai KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, TRANSFER POSITION CORRECTION METH...
Publication number
20220388785
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...
Publication number
20220270904
Publication date
Aug 25, 2022
TOKYO ELECTRON LIMITED
Youngtai KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION SYSTEM AND DEPOSITION METHOD
Publication number
20220259729
Publication date
Aug 18, 2022
TOKYO ELECTRON LIMITED
Youngtai KANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONTROL DEVICE, SYSTEM AND CONTROL METHOD
Publication number
20220020618
Publication date
Jan 20, 2022
TOKYO ELECTRON LIMITED
Yuichi TAKENAGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...
Publication number
20210020479
Publication date
Jan 21, 2021
TOKYO ELECTRON LIMITED
Youngtai KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...
Publication number
20210020487
Publication date
Jan 21, 2021
TOKYO ELECTRON LIMITED
Youngtai KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LICENSE AUTHENTICATION DEVICE AND LICENSE AUTHENTICATION METHOD
Publication number
20200380095
Publication date
Dec 3, 2020
TOKYO ELECTRON LIMITED
Takahito KASAI
G06 - COMPUTING CALCULATING COUNTING