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Youngwon SHIN
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Suwon-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Plasma apparatus and methods of manufacturing semiconductor device...
Patent number
11,776,858
Issue date
Oct 3, 2023
Samsung Electronics Co., Ltd.
Joonsung Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shower head assembly and plasma processing apparatus having the same
Patent number
11,488,804
Issue date
Nov 1, 2022
Samsung Electronics Co., Ltd.
Youngwon Shin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA APPARATUS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE...
Publication number
20200402866
Publication date
Dec 24, 2020
Samsung Electronics Co., Ltd.
Joonsung LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWER HEAD ASSEMBLY AND PLASMA PROCESSING APPARATUS HAVING THE SAME
Publication number
20200365373
Publication date
Nov 19, 2020
Samsung Electronics Co., Ltd.
Youngwon SHIN
H01 - BASIC ELECTRIC ELEMENTS