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Younus Vora
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method and apparatus to reduce thermal stress by regulation and con...
Patent number
9,534,848
Issue date
Jan 3, 2017
KLA-Tencor Corporation
Jincheng Wang
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Diode laser based broad band light sources for wafer inspection tools
Patent number
9,110,037
Issue date
Aug 18, 2015
KLA-Tencor Corporation
Anant Chimmalgi
G01 - MEASURING TESTING
Information
Patent Grant
Diode laser based broad band light sources for wafer inspection tools
Patent number
8,896,827
Issue date
Nov 25, 2014
KLA-Tencor Corporation
Anant Chimmalgi
G01 - MEASURING TESTING
Information
Patent Grant
Computer-implemented methods, computer-readable media, and systems...
Patent number
8,073,240
Issue date
Dec 6, 2011
KLA-Tencor Corp.
Verlyn Fischer
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for imaging dense linewidth features using an...
Patent number
5,386,317
Issue date
Jan 31, 1995
Prometrix Corporation
Timothy R. Corle
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
DIODE LASER BASED BROAD BAND LIGHT SOURCES FOR WAFER INSPECTION TOOLS
Publication number
20150042979
Publication date
Feb 12, 2015
KLA-Tencor Corporation
Anant Chimmalgi
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus to Reduce Thermal Stress by Regulation and Con...
Publication number
20140060792
Publication date
Mar 6, 2014
KLA-Tencor Corporation
Jincheng Wang
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
DIODE LASER BASED BROAD BAND LIGHT SOURCES FOR WAFER INSPECTION TOOLS
Publication number
20130342825
Publication date
Dec 26, 2013
Anant Chimmalgi
G01 - MEASURING TESTING
Information
Patent Application
COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS...
Publication number
20080279444
Publication date
Nov 13, 2008
Verlyn Fischer
G01 - MEASURING TESTING