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Yousen Li
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Shanghai, CN
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last 30 patents
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Patent Grant
Method for measuring temperature of film in reaction chamber
Patent number
9,696,209
Issue date
Jul 4, 2017
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Lu Chen
G01 - MEASURING TESTING
Information
Patent Grant
Method and device for measuring temperature of substrate in vacuum...
Patent number
9,443,715
Issue date
Sep 13, 2016
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Yousen Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR MEASURING TEMPERATURE OF FILM IN REACTION CHAMBER
Publication number
20150025832
Publication date
Jan 22, 2015
Advanced Micro-Fabrication Equipment Inc., Shanghai
Lu Chen
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE FOR MEASURING TEMPERATURE OF SUBSTRATE IN VACUUM...
Publication number
20130292370
Publication date
Nov 7, 2013
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Yousen Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...