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Youssef Karel Maria De Vos
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Lille, BE
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last 30 patents
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Patent Application
Stage system and lithographic apparatus comprising such a stage system
Publication number
20080309911
Publication date
Dec 18, 2008
ASML NETHERLANDS B.V.
Youssef Karel Maria De Vos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage system and lithographic apparatus comprising such stage system
Publication number
20080212054
Publication date
Sep 4, 2008
ASML NETHERLANDS B.V.
Ramidin Izair Kamidi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060139590
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Ronald Casper Kunst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY