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Yousuke Imai
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Hiratsuka-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Extreme ultra violet light source device
Patent number
7,271,401
Issue date
Sep 18, 2007
Komatsu Ltd.
Yousuke Imai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Extreme ultra violet light source device
Publication number
20060186356
Publication date
Aug 24, 2006
Yousuke Imai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR