Yozo Fukagawa

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Kawachi-machi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and its control method, stage apparatus, and dev...
- Patent number 6,741,328
- Issue date May 25, 2004
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and its control method, stage apparatus, and dev...
- Patent number 6,330,052
- Issue date Dec 11, 2001
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and its control method, stage apparatus, and dev...
- Publication number 20020044269
- Publication date Apr 18, 2002
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY