Yozo Ikedo

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film-forming material mixed-gas forming device and film forming device
- Patent number 11,639,548
- Issue date May 2, 2023
- ASM IP Holding B.V.
- Hua Feng Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 10,526,704
- Issue date Jan 7, 2020
- ASM IP Holding B.V.
- Yuya Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor
- Patent number D864134
- Issue date Oct 22, 2019
- ASM IP Holding B.V.
- Toshiharu Watarai
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate treatment apparatus
- Patent number 10,435,789
- Issue date Oct 8, 2019
- ASM IP Holding B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate-supporting device
- Patent number 7,691,205
- Issue date Apr 6, 2010
- ASM Japan K.K.
- Yozo Ikedo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming fluorine-doped low-dielectric-constant insulating...
- Patent number 7,037,855
- Issue date May 2, 2006
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM-FORMING MATERIAL MIXED-GAS FORMING DEVICE AND FILM FORMING DEVICE
- Publication number 20210054504
- Publication date Feb 25, 2021
- ASM IP HOLDING B.V.
- Hua Feng Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20180158709
- Publication date Jun 7, 2018
- ASM IP HOLDING B.V.
- Naoto TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20160222513
- Publication date Aug 4, 2016
- ASM IP HOLDING B.V.
- Yuya NONAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate-supporting device
- Publication number 20070089670
- Publication date Apr 26, 2007
- ASM JAPAN K.K.
- Yozo Ikedo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FLUORINE-DOPED LOW-DIELECTRIC-CONSTANT INSULATING...
- Publication number 20060046519
- Publication date Mar 2, 2006
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...