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Yozo Matsuda
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Suwon-si, KR
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last 30 patents
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Patent Grant
Extreme ultraviolet (EUV) collector inspection apparatus and method
Patent number
11,676,263
Issue date
Jun 13, 2023
Samsung Electronics Co., Ltd.
Dong-Hyub Lee
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
EUV COLLECTOR INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20230108698
Publication date
Apr 6, 2023
Samsung Electronics Co., Ltd.
Jongbin Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXTREME ULTRAVIOLET (EUV) COLLECTOR INSPECTION APPARATUS AND METHOD
Publication number
20220309643
Publication date
Sep 29, 2022
Samsung Electronics Co., Ltd.
Dong-Hyub Lee
G06 - COMPUTING CALCULATING COUNTING