Yozo Nagata

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Patents Grantslast 30 patents

Information Patent Grant
Control device, substrate processing system, substrate processing m...
- Patent number 10,692,782
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...
- Publication number 20170271215
- Publication date Sep 21, 2017
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- G01 - MEASURING TESTING