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Yu Chen-Hua Douglas
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Keelung, TW
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Patents Grants
last 30 patents
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Patent Grant
Plasma treatment to improve barrier layer performance over porous l...
Patent number
7,176,141
Issue date
Feb 13, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Simon Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction of via over etching for borderless contacts
Patent number
5,840,624
Issue date
Nov 24, 1998
Taiwan Semiconductor Manufacturing Company, Ltd.
Syun-Ming Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating double silicide gate electrode structures on...
Patent number
5,723,893
Issue date
Mar 3, 1998
Taiwan Semiconductor Manufacturing Company, Ltd.
Douglas Chen-Hua Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two step etch back process having a convex and concave etch profile...
Patent number
5,639,345
Issue date
Jun 17, 1997
Taiwan Semiconductor Manufacturing Company Ltd.
Yuan-Chang Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process to minimize a seam in tungsten filled contact holes
Patent number
5,622,894
Issue date
Apr 22, 1997
Taiwan Semiconductor Manufacturing Company Ltd.
Syun-Ming Jang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Plasma treatment to improve barrier layer performance over porous l...
Publication number
20060051947
Publication date
Mar 9, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Simon Lin
H01 - BASIC ELECTRIC ELEMENTS