Yu-Chih LIOU

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Tainan, TW

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Patents Grantslast 30 patents

Information Patent Grant
System for securely dechucking wafers
- Patent number 8,416,555
- Issue date Apr 9, 2013
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Tsung Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for safely dechucking wafers
- Patent number 8,000,081
- Issue date Aug 16, 2011
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Tsung Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for securely dechucking wafers
- Patent number 7,995,323
- Issue date Aug 9, 2011
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Tsung Lu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR SECURELY DECHUCKING WAFERS
- Publication number 20110310525
- Publication date Dec 22, 2011
- Taiwan Semiconductor Manufacturing Co., LTD
- Chung-Tsung LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUCURELY DECHUCKING WAFERS
- Publication number 20100008014
- Publication date Jan 14, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Chung-Tsung LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SAFELY DECHUCKING WAFERS
- Publication number 20100008013
- Publication date Jan 14, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Chung-Tsung LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ventilation system and method of using
- Publication number 20040002299
- Publication date Jan 1, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Mu-Tsang Lin
- H01 - BASIC ELECTRIC ELEMENTS