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last 30 patents
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Patent Grant
Support unit and substrate treating apparatus including the same
Patent number
11,915,905
Issue date
Feb 27, 2024
Semes Co., Ltd.
Hyoungkyu Son
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
Publication number
20210005419
Publication date
Jan 7, 2021
SEMES CO., LTD.
Hyoungkyu SON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWER HEAD UNIT AND SYSTEM FOR TREATING SUBSTRATE WITH THE SHOWER...
Publication number
20210005424
Publication date
Jan 7, 2021
SEMES CO., LTD.
Hyoungkyu Son
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND COMPONENTS THEREOF
Publication number
20190122869
Publication date
Apr 25, 2019
SEMES CO., LTD.
YU DONG HAN
H01 - BASIC ELECTRIC ELEMENTS