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Yu-Lin Du
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Chihshang Township, TW
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last 30 patents
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Patent Grant
Method for temperature control in a rapid thermal processing system
Patent number
7,368,303
Issue date
May 6, 2008
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Ming You
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method for temperature control in a rapid thermal processing system
Publication number
20060084188
Publication date
Apr 20, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Ming You
H01 - BASIC ELECTRIC ELEMENTS