Yu Lun Ke

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method for manufacturing semiconductor structure
- Patent number 12,165,851
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Lun Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect system with improved low-K dielectrics
- Patent number 12,080,547
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Joung-Wei Liou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch profile control of interconnect structures
- Patent number 11,854,873
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Lun Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch process with rotatable shower head
- Patent number 11,227,747
- Issue date Jan 18, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus ring for plasma etcher
- Patent number 11,075,087
- Issue date Jul 27, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect system with improved low-k dielectrics
- Patent number 11,043,373
- Issue date Jun 22, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Joung-Wei Liou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch process with rotatable shower head
- Patent number 10,529,543
- Issue date Jan 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus ring for plasma etcher
- Patent number 10,504,738
- Issue date Dec 10, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
- Publication number 20250069860
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Lun KE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERCONNECT SYSTEM WITH IMPROVED LOW-K DIELECTRICS
- Publication number 20240363336
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Joung-Wei Liou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH PROFILE CONTROL OF INTERCONNECT STRUCTURES
- Publication number 20230377963
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Lun KE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
- Publication number 20230036955
- Publication date Feb 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Lun KE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interconnect System with Improved Low-K Dielectrics
- Publication number 20210313174
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Joung-Wei Liou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING FOR PLASMA ETCHER
- Publication number 20200058513
- Publication date Feb 20, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etch Process With Rotatable Shower Head
- Publication number 20200051791
- Publication date Feb 13, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERCONNECT SYSTEM WITH IMPROVED LOW-K DIELECTRICS
- Publication number 20200043721
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Joung-Wei Liou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING FOR PLASMA ETCHER
- Publication number 20200043740
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING FOR PLASMA ETCHER
- Publication number 20190333784
- Publication date Oct 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH PROCESS WITH ROTATABLE SHOWER HEAD
- Publication number 20190148116
- Publication date May 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Plasma processing method for manufacturing semiconductor structure

Interconnect system with improved low-K dielectrics

Etch profile control of interconnect structures

Etch process with rotatable shower head

Focus ring for plasma etcher

Interconnect system with improved low-k dielectrics

Etch process with rotatable shower head

Focus ring for plasma etcher

Patents Applicationslast 30 patents

PLASMA PROCESSING METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE

INTERCONNECT SYSTEM WITH IMPROVED LOW-K DIELECTRICS

ETCH PROFILE CONTROL OF INTERCONNECT STRUCTURES

PLASMA PROCESSING METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE

Interconnect System with Improved Low-K Dielectrics

FOCUS RING FOR PLASMA ETCHER

Etch Process With Rotatable Shower Head

INTERCONNECT SYSTEM WITH IMPROVED LOW-K DIELECTRICS

FOCUS RING FOR PLASMA ETCHER

FOCUS RING FOR PLASMA ETCHER

ETCH PROCESS WITH ROTATABLE SHOWER HEAD