Yu MACHIDA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and apparatus
- Patent number 10,811,284
- Issue date Oct 20, 2020
- Ebara Corporation
- Toshifumi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND STORA...
- Publication number 20220130662
- Publication date Apr 28, 2022
- EBARA CORPORATION
- Satoru Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND STORA...
- Publication number 20200066510
- Publication date Feb 27, 2020
- EBARA CORPORATION
- Satoru Yamamoto
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20190184517
- Publication date Jun 20, 2019
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20180277401
- Publication date Sep 27, 2018
- EBARA CORPORATION
- Toshifumi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS