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Yu NAGATOMO
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Workpiece processing method
Patent number
10,685,848
Issue date
Jun 16, 2020
Tokyo Electon Limited
Yu Nagatomo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and workpiece processing method
Patent number
10,566,209
Issue date
Feb 18, 2020
Tokyo Electron Limited
Yu Nagatomo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
9,786,512
Issue date
Oct 10, 2017
Tokyo Electron Limited
Yu Nagatomo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
9,779,961
Issue date
Oct 3, 2017
Tokyo Electron Limited
Yusuke Saitoh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WORKPIECE PROCESSING METHOD
Publication number
20190080929
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Yu NAGATOMO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND WORKPIECE PROCESSING METHOD
Publication number
20190074191
Publication date
Mar 7, 2019
TOKYO ELECTRON LIMITED
Yu Nagatomo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20160293440
Publication date
Oct 6, 2016
TOKYO ELECTRON LIMITED
Yu NAGATOMO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20160064245
Publication date
Mar 3, 2016
TOKYO ELECTRON LIMITED
Yusuke SAITOH
H01 - BASIC ELECTRIC ELEMENTS