Yu NUNOSHIGE

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,009,217
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,732,357
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas processing apparatus
- Patent number 11,578,408
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Takashi Kamio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas processing apparatus and gas processing method
- Patent number 11,499,225
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Hirotaka Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 11,248,293
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Hirotaka Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 10,864,548
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Hiroaki Ashizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply apparatus and gas supply method
- Patent number 10,767,262
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Shigeyuki Okura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate mounting method and substrate mounting device
- Patent number 10,340,176
- Issue date Jul 2, 2019
- Tokyo Electron Limited
- Toshiaki Fujisato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus, gas supply device and film forming method
- Patent number 9,644,266
- Issue date May 9, 2017
- Tokyo Electron Limited
- Masayuki Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220189779
- Publication date Jun 16, 2022
- Tokyo Electron Limited
- Tsuyoshi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200392622
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Tsuyoshi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
- Publication number 20200071831
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS PROCESSING APPARATUS AND GAS PROCESSING METHOD
- Publication number 20200048765
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Apparatus and Film Forming Method
- Publication number 20200048764
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS PROCESSING APPARATUS
- Publication number 20190024234
- Publication date Jan 24, 2019
- TOKYO ELECTRON LIMITED
- Takashi KAMIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20180311700
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Hiroaki Ashizawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD
- Publication number 20180037991
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Shigeyuki OKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING METHOD AND SUBSTRATE MOUNTING DEVICE
- Publication number 20180040503
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Toshiaki FUJISATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, GAS SUPPLY DEVICE AND FILM FORMING METHOD
- Publication number 20140295083
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Masayuki NASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yu NUNOSHIGE

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Gas processing apparatus

Gas processing apparatus and gas processing method

Film-forming apparatus and film-forming method

Film forming method and film forming apparatus

Gas supply apparatus and gas supply method

Substrate mounting method and substrate mounting device

Film forming apparatus, gas supply device and film forming method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM-FORMING APPARATUS AND FILM-FORMING METHOD

GAS PROCESSING APPARATUS AND GAS PROCESSING METHOD

Film Forming Apparatus and Film Forming Method

GAS PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD

SUBSTRATE MOUNTING METHOD AND SUBSTRATE MOUNTING DEVICE

FILM FORMING APPARATUS, GAS SUPPLY DEVICE AND FILM FORMING METHOD