Yu Sasaki

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Nozzle and substrate processing apparatus using same
- Patent number 10,472,719
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of detoxifying exhaust pipe and film forming apparatus
- Patent number 10,053,776
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,929,008
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 8,980,371
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20210087684
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Yu SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Apparatus
- Publication number 20180258527
- Publication date Sep 13, 2018
- TOKYO ELECTRON LIMITED
- Yu SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS
- Publication number 20160220953
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME
- Publication number 20160138158
- Publication date May 19, 2016
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160111278
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD, STORAGE MEDIUM, AND FILM DEPOSITION APPARATUS
- Publication number 20140147591
- Publication date May 29, 2014
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Nozzle and substrate processing apparatus using same

Method of detoxifying exhaust pipe and film forming apparatus

Substrate processing method and substrate processing apparatus

Film deposition method

Patents Applicationslast 30 patents

DEPOSITION APPARATUS AND DEPOSITION METHOD

Film Forming Apparatus

METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS

NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM DEPOSITION METHOD, STORAGE MEDIUM, AND FILM DEPOSITION APPARATUS