Yu Wang Bibby

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St. Albans, VT, US

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Patents Grantslast 30 patents

Information Patent Grant
Automated electrode replacement apparatus for a plasma processing s...
- Patent number 6,753,498
- Issue date Jun 22, 2004
- Tokyo Electron Limited
- Murray D. Sirkis
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Automated electrode replacement apparatus for a plasma processing s...
- Publication number 20030127433
- Publication date Jul 10, 2003
- Murray D. Sirkis
- H01 - BASIC ELECTRIC ELEMENTS