Yu-Wei Cheng

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Kaohsiung City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Measurement method of overlay mark structure
- Patent number 11,043,460
- Issue date Jun 22, 2021
- United Microelectronics Corp.
- Yu-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay mark structure and measurement method thereof
- Patent number 10,811,362
- Issue date Oct 20, 2020
- United Microelectronics Corp.
- Yu-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing nitride material
- Patent number 8,883,033
- Issue date Nov 11, 2014
- United Microelectronics Corp.
- Chi-Sheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist removal method and patterning process utilizing the same
- Patent number 8,785,115
- Issue date Jul 22, 2014
- United Microelectronics Corp.
- Hung-Yi Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT METHOD OF OVERLAY MARK STRUCTURE
- Publication number 20200388577
- Publication date Dec 10, 2020
- UNITED MICROELECTRONICS CORP.
- Yu-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY MARK STRUCTURE AND MEASUREMENT METHOD THEREOF
- Publication number 20200219821
- Publication date Jul 9, 2020
- UNITED MICROELECTRONICS CORP.
- Yu-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING NITRIDE MATERIAL
- Publication number 20140256151
- Publication date Sep 11, 2014
- UNITED MICROELECTRONICS CORP.
- Chi-Sheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST REMOVAL METHOD AND PATTERNING PROCESS UTILIZING THE SAME
- Publication number 20130210237
- Publication date Aug 15, 2013
- United Microelectronics Corp.
- Hung-Yi Wu
- H01 - BASIC ELECTRIC ELEMENTS