Yu YOSHINO

Person

Moriyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for supplying mixed gas
- Patent number 9,533,268
- Issue date Jan 3, 2017
- Iwatani Corporation
- Kunihiko Koike
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for treating inner surface of chlorine trifluoride supply pa...
- Patent number 9,416,445
- Issue date Aug 16, 2016
- Iwatani Corporation
- Yu Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning apparatus and vacuum processing system
- Patent number 9,214,364
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Kazuya Dobashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dividing method for wafer
- Patent number 9,159,622
- Issue date Oct 13, 2015
- Disco Corporation
- Sakae Matsuzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster jet processing method, semiconductor element, microelectrom...
- Patent number 8,461,051
- Issue date Jun 11, 2013
- Iwatani Corporation
- Kunihiko Koike
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DIVIDING METHOD FOR WAFER
- Publication number 20150044857
- Publication date Feb 12, 2015
- Disco Corporation
- Sakae Matsuzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TREATING INNER SURFACE OF CHLORINE TRIFLUORIDE SUPPLY PA...
- Publication number 20150041430
- Publication date Feb 12, 2015
- IWATANI CORPORATION
- Yu Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING MIXED GAS
- Publication number 20150020890
- Publication date Jan 22, 2015
- IWATANI CORPORATION
- Kunihiko KOIKE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESSING METHOD UTILIZING CLUSTER
- Publication number 20140061031
- Publication date Mar 6, 2014
- KYOTO UNIVERSITY
- Yu YOSHINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND VACUUM PROCESSING SYSTEM
- Publication number 20120247670
- Publication date Oct 4, 2012
- IWATANI CORPORATION
- Kazuya DOBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Ma...
- Publication number 20120071003
- Publication date Mar 22, 2012
- Kazuya Dobashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLUSTER JET PROCESSING METHOD, SEMICONDUCTOR ELEMENT, MICROELECTROM...
- Publication number 20110147896
- Publication date Jun 23, 2011
- IWATANI CORPORATION
- Kunihiko Koike
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Person

Patents Grantslast 30 patents

Method and apparatus for supplying mixed gas

Method for treating inner surface of chlorine trifluoride supply pa...

Substrate cleaning apparatus and vacuum processing system

Dividing method for wafer

Cluster jet processing method, semiconductor element, microelectrom...

Patents Applicationslast 30 patents

DIVIDING METHOD FOR WAFER

METHOD FOR TREATING INNER SURFACE OF CHLORINE TRIFLUORIDE SUPPLY PA...

METHOD AND APPARATUS FOR SUPPLYING MIXED GAS

PROCESSING METHOD UTILIZING CLUSTER

SUBSTRATE CLEANING APPARATUS AND VACUUM PROCESSING SYSTEM

Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Ma...

CLUSTER JET PROCESSING METHOD, SEMICONDUCTOR ELEMENT, MICROELECTROM...